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 Vol 14: A Novel Micro- and Nano-Scale Positioning Sensor Based on Radio Frequency Resonant Cavities.


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This article is from Sensors (Basel, Switzerland), volume 14.AbstractIn many micro- and nano-scale technological applications high sensitivity displacement sensors are needed, especially in ultraprecision metrology and manufacturing. In this work a new way of sensing displacement based on radio frequency resonant cavities is presented and experimen

Autor: Asua, Estibaliz; Etxebarria, Victor; Garcia-Arribas, Alfredo; Feutchwanger, Jorge; Portilla, Joaquin; Lucas, Julio

Fuente: https://archive.org/



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