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1 Institut für Mikrostrkturtechnic 2 Institute for Microstructure Technology IMT 3 Department of Mechanical Engineering MEK 4 Department of Microsystems Engineering - IMTEK 5 CEA-LETI - Laboratoire d-Electronique et des Technologies de l-Information

Abstract : Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations e.g. with gradients. In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 μm high.

Autor: M. Worgull - M. Heckele - T. Mappes - B. Matthis - G. Tosello - T. Metz - J. Gavillet - P. Koltay - H. N. Hansen -



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