INTEGRATED 3D SOUND INTENSITY SENSOR WITH FOUR-WIRE PARTICLE VELOCITY SENSORSReportar como inadecuado




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1 Transducers Science and Technology group, MESA+ Institute for Nanotechnology

Abstract : A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded -back chamber- at both sides of the chip.





Autor: Doekle Yntema - Joost Van Honschoten - Remco Wiegerink -

Fuente: https://hal.archives-ouvertes.fr/



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