DEPOSITION OF DIAMOND LAYERS BY HOT-FILAMENT ACTIVATED CVD USING ACETONE AS A CARBON SOURCEReportar como inadecuado




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Abstract : Diamond layers were grown on SiAlON substrates by hotfilament activated chemical vapour deposition TA-CVD using acetone-hydrogen gas mixtures. The acetone concentration and the gas pressure greatly influenced the crystal size and quality of diamond deposited. Increasing the total gas pressure and the acetone concentration increased the diamond growth rate. The carbonyl group apparently did not decompose during the thermal decomposition of the acetone on the tantalum filament, Comparing the two carbon sources acetone and methane, similar growth rates were obtained if equivalent CH3 concentrations were used, but when compared in volume percentage, acetone resulted in much higher growth rates. This confirms the earlier report from Hirose and Terasawa -l-. Comparing methane with acetone at equivalent volume percent concentrations, acetone increased the diamond nucleation rate. Thus the deposition rates were increased more during the early growth than during longer growth periods.





Autor: S. Okoli R. Haubner B. Lux

Fuente: https://hal.archives-ouvertes.fr/



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