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Abstract: In this paper, we report the advantage of using AC actuating signal fordriving MEMS actuators instead of DC voltages. The study is based upon micromirror devices used in digital mode for optical switching operation. When thepull-in effect is used, charge injection occurs when the micro mirror ismaintained in the deflected position. To avoid this effect, a geometricalsolution is to realize grounded landing electrodes which are electro-staticallyseparated from the control electrodes. Another solution is the use of AC signalwhich eliminates charge injection particularly if a bipolar signal is used.Long term experiments have demonstrated the reliability of such a signalcommand to avoid injection of electric charges.



Autor: H. Camon LAAS, C. Ganibal LAAS, N. Rapahoz, M. Trzmiel, C. Pisella, C. Martinez LETI, K. Gilbert LETI, S. Valette LETI

Fuente: https://arxiv.org/







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