Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor - Computer Science > Other Computer ScienceReportar como inadecuado




Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor - Computer Science > Other Computer Science - Descarga este documento en PDF. Documentación en PDF para descargar gratis. Disponible también para leer online.

Abstract: This study has successfully demonstrated a novel self-heating formaldehydegas sensor based on a thin film of NiO sensing layer. A new fabrication processhas been developed in which the Pt micro heater and electrodes are depositeddirectly on the substrate and the NiO thin film is deposited above on the microheater to serve as sensing layer. Pt electrodes are formed below the sensinglayer to measure the electrical conductivity changes caused by formaldehydeoxidation at the oxide surface. Furthermore, the upper sensing layer andNiO-Al2O3 co-sputtering significantly increases the sensitivity of the gassensor, improves its detection limit capability. The microfabricatedformaldehyde gas sensor presented in this study is suitable not only forindustrial process monitoring, but also for the detection of formaldehydeconcentrations in buildings in order to safeguard human health.



Autor: Yu-Hsiang Wang, C.-C. Hsiao, Chia-Yen Lee, R.-H. Ma, Po-Cheng Chou

Fuente: https://arxiv.org/







Documentos relacionados