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Abstract : Thin films of ZnO have been prepared by the double photobeams ultraviolet laser induced- metallorganic chemical vapour deposition MOCVD technique. The structure and transparent photoconductive property of these films are investigated by X-ray diffraction XRD , reflecting electron diffraction RED, scanning electron microscopy SEM and ultraviolet visible absorption spectrometry UV. The experiment shows that the technique produces superior quality films of polycrystal ZnO and possesses higher deposition rate, lower temperature of growth and far better transparent photoconductive property than those grown by the conventional CVD or MOCVD technique.

Autor: Z. Tan P. Ren W. Luo



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