A TIME-OF-FLIGHT MASS SPECTROMETER FOR SIMS AND FIELD IONISED NEUTRAL ANALYSIS USING A PULSED LMISReport as inadecuate




A TIME-OF-FLIGHT MASS SPECTROMETER FOR SIMS AND FIELD IONISED NEUTRAL ANALYSIS USING A PULSED LMIS - Download this document for free, or read online. Document in PDF available to download.



Abstract : A new surface analysis instrument has been developed using an energy-compensated time-of-flight mass spectrometer. Samples are ionised for analysis either by microfocussed laser irradiation or by sputtering with a microfocussed < 0.25 µm mass-filtered beam of Ga+ ions from a liquid metal ion source. A framestore-based data system allows the simultaneous capture o f both SIMS mass spectra and mass-resolved ion images. Data are presented illustrating both SIMS and Laser Microprobe performance. Data are also presented showing enhanced ion yield from the sputtering of a gold tip, due to field ionisation of sputtered neutrals.





Author: A. Waugh D. Kingham C. Richardson M. Goff

Source: https://hal.archives-ouvertes.fr/



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