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TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency RF modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.

KEYWORDS

Plasma, Polymerization, Surface

Cite this paper

Li, Z. , Li, X. , Liu, G. , Pireaux, J. , Houssiau, L. and Bonifaci, N. 2016 Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma. Journal of Applied Mathematics and Physics, 4, 1528-1532. doi: 10.4236-jamp.2016.48162.





Autor: Z. Li1, X. Li1, G. Liu1, J.-J. Pireaux2, L. Houssiau2, N. Bonifaci3

Fuente: http://www.scirp.org/



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