In Situ Acoustic Temperature Measurement During Variable-Frequency Microwave CuringReportar como inadecuado


In Situ Acoustic Temperature Measurement During Variable-Frequency Microwave Curing


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Variable-frequency microwave VFM curing can perform the same processing steps as conventional thermal processing in minutes, without compromising intrinsic material properties. With increasing demand for novel dielectrics, there is a corresponding demand for new processing techniques that lead to comparable or better properties than conventional methods. VFM processing can be a viable alternative to conventional thermal techniques. However, current limitations include a lack of reliable temperature measuring techniques. This research focuses on developing a reliable temperature measuring system using acoustic techniques to monitor low-k polymer dielectrics cured on silicon wafers in a VFM furnace. The acoustic sensor exhibits the capability to measure temperatures from 20 degrees C to 300 degrees C with an attainable accuracy of ± 2 degrees.



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Autor: Davis, Cleon E. - Dickherber, Anthony - Hunt, William D. - May, Gary S. - -

Fuente: https://smartech.gatech.edu/







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