NEW COMPOUNDS OBTAINED BY LPCVD IN THE B-C-N CHEMICAL SYSTEMReportar como inadecuado




NEW COMPOUNDS OBTAINED BY LPCVD IN THE B-C-N CHEMICAL SYSTEM - Descarga este documento en PDF. Documentación en PDF para descargar gratis. Disponible también para leer online.



Abstract : The composition and some physical properties of boron-carbon- nitrogen solid solutions prepared by chemical vapor deposition CVD have been investigated. Crystalline and amorphous films resulting from heterogeneous nucleation were characterized by X-ray diffraction, XPS, RBS and TEM. The compositions of these single-phase materials are concentrated in two domains located in the B-N>1 part of the B-C-N composition diagram. The carbon-rich domain corresponds to an ideal C5B2N composition with various structural defects. The thermal stability behavior of these films is characterized by the absence of any mass loss after 1 hour at 1700°C while graphitization and formation of small amounts of B13C2 are observed. Density and electrical conductivity measurements were also performed.





Autor: F. Saugnac F. Teyssandier A. Marchand

Fuente: https://hal.archives-ouvertes.fr/



DESCARGAR PDF




Documentos relacionados