Dust Successive Generations in Ar-SiH4: Dust Cloud DynamicsReportar como inadecuado

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1 GREMI - Groupe de recherches sur l-énergétique des milieux ionisés

Abstract : Successive generations of dust particles in an Ar-SiH4 plasma, are shown to take place in the void region. We evidence that this cyclic phenomenon is also related to self-excited low frequency oscillations. These different results are obtained by correlating several diagnostics. We studied dust particle successive generations and the related dust cloud dynamics in silane based plasmas. Indeed, the growth of silicon nanoparticles is known to follow a well-defined cycle. Thanks to the correlation of various diagnostics electrical, optical, ex-situ SEM, we evidenced a void region in the plasma and its specific structure. We especially showed that dust new generations grow inside this void region close to the plasma center. Moreover, an instability phenomenon linked to this cyclic growth in the void has been brought to the fore.

Mots-clés : Silane Void Dust particle growth Instabilities

Autor: Marjorie Cavarroc - Maxime Mikikian - Yves Tessier - Laifa Boufendi -

Fuente: https://hal.archives-ouvertes.fr/


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