Ion-assisted CVD of graded diamond like carbon DLC based coatingsReport as inadecuate

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Abstract : Graded DLC based coatings and multilayers for wear resistance applications have been produced using a novel hybrid unbalanced magnetron sputtering- low pressure CVD System. The main features of this highly flexible and scalable process are discussed. These films have been characterised using a variety of techniques including SEM, microhardness, adhesion, wear rate and lifetime tests. For example : microhardness of > 4000 Hv ; excellent adhesion, Lc 115-125 N ; coefficient of friction during prolonged mnning against WC of 0.15 ; volumetric wear rates 1-5 of that of TiN. The process is ideally suited to large substrate size and volume production for many different kinds of applications.

Author: D. Monaghan D. Teer R. Arnell I. Efeoglu W. Ahmed



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