Preparation of Hexagonal Boron Nitride Nano-Powders by Chemical Vapor DepositionReport as inadecuate




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Boron nitride nanopowder was prepared with borazine as precursor, by chemical vapor deposition at temperatures of 800 oC and 900 oC. The powder was characterized by IR, XRD, and SEM. It is shown that the powder prepared at 800 oC has some mount of hydrogen. However, the powder deposited at 900 oC is pure and partially crystallized h-BN with the size of about 50 nm.

KEYWORDS

chemical vapor deposition; boron nitride, borazine; nanopowder

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Author: Jun-sheng Li, Chang-rui Zhang, Bin Li, Si-qing Wang

Source: http://www.scirp.org/



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