Observation of Etch Hills of ZnGeP2 CrystalsReport as inadecuate

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Iodine was saturated with the mixture of CH3COOH, HF and HNO3 with the volume ratio of 1:2:2 to dissolve into an etching solution. Then the ZnGeP2 wafers were etched in the etching solution for 20 min with ice-water bath and vibration by ultrasonic. The etch hills were clearly observed in Scanning Electron Microscope SEM. The etch hills with certain degree of symmetry have certain height and size. The formation of the etch hills is theoretically analyzed. Results of the research have certain reference value on orientation, device-processing and improvement of growth technique for ZnGeP2 single crystals.


ZnGeP2 crystal; etch hill; SEM

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Author: Mao Ye, Xiu-ying Huan, Gang Peng, Yi-min Wang

Source: http://www.scirp.org/


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