Growth and Characterization of CeO2 Thin Film by Laser Molecular-Beam EpitaxyReport as inadecuate




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Using metal Ce as target, epitaxial CeO2 thin films were grown on SrTiO3 substrates by laser molecular-beam epitaxy with oxygen atmosphere. The clear bar diffraction patterns of CeO2 thin film were observed by in-situ RHEED,it shows the growth model of thin film is sandwich.XRD spectrum indicates the structural properties of CeO2 thin film is good structure with 200and 400 orientation. The AFM shows that the thin film has a atuomically smooth surface and the root-mean-square roughness of 0.272 nm over a 2μm×2μm area.

KEYWORDS

Laser molecular beam epitaxy, CeO2 thin film, Reflection high energy electron diffraction RHEED.

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Author: Jun Chen, Fang-fang Ge, Hong-liang Zhang, Xue-ming Wang

Source: http://www.scirp.org/



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