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Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800, P.R.China





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Abstract In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of ITO thin films were investigated. The results show ITO thin films have good sensitivity to nitrogen dioxide.

Keywords: Thin film; spray pyrolysis; Gas sensor; ITO Thin film; spray pyrolysis; Gas sensor; ITO





Autor: Zheng Jiao * , Minghong Wu, Zheng Qin, Minghua Lu and Jianzhong Gu

Fuente: http://mdpi.com/



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