A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne InterferometryReport as inadecuate




A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry - Download this document for free, or read online. Document in PDF available to download.

Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, ROC





Abstract A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated. View Full-Text

Keywords: Total internal reflection TIR; surface plasmon resonance SPR; heterodyne interferometry HI; small-displacement sensor Total internal reflection TIR; surface plasmon resonance SPR; heterodyne interferometry HI; small-displacement sensor





Author: Shinn-Fwu Wang

Source: http://mdpi.com/



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