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Department of Physics, Nanjing University, Nanjing, 210093, China


National Key Lab. of Monolithic Integrated Circuits and Modules, Nanjing, 210016, China


Nanjing Electronic Devices Institute, Nanjing, China


Author to whom correspondence should be addressed.

Abstract This paper presents a wide band compact high isolation microelectromechanical systems MEMS switch implemented on a coplanar waveguide CPW with three ohmic switch cells, which is based on the series-shunt switch design. The ohmic switch shows a low intrinsic loss of 0.1 dB and an isolation of 24.8 dB at 6 GHz. The measured average pull-in voltage is 28 V and switching time is 47 µs. In order to shorten design period of the high isolation switch, a structure-based small-signal model for the 3-port ohmic MEMS switch is developed and parameters are extracted from the measured results. Then a high isolation switch has been developed where each 3-port ohmic MEMS switch is closely located. The agreement of the measured and modeled radio frequency RF performance demonstrates the validity of the electrical equivalent model. Measurements of the series-shunt switch indicate an outstanding isolation of more than 40 dB and a low insertion loss of 0.35 dB from DC to 12 GHz with total chip size of 1 mm × 1.2 mm. View Full-Text

Keywords: series-shunt; RF MEMS switch; metal-contact; electrical model series-shunt; RF MEMS switch; metal-contact; electrical model

Autor: Yuan-Wei Yu 1,2,3,* , Jian Zhu 2,3, Shi-Xing Jia 3 and Yi Shi 1

Fuente: http://mdpi.com/


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