Development of a Prototype Miniature Silicon MicrogyroscopeReport as inadecuate




Development of a Prototype Miniature Silicon Microgyroscope - Download this document for free, or read online. Document in PDF available to download.

School of Instrument Science and Engineering, Southeast University, Nanjing City, Jiangsu Province, 210096, China





*

Author to whom correspondence should be addressed.



Abstract A miniature vacuum-packaged silicon microgyroscope SMG with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control AGC loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV-o-s, in full measurement range of ± 300 deg-s, the zero bias stability reaches 15o-h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 oC to 80 oC. View Full-Text

Keywords: silicon microgyroscope SMG; self-oscillating; dual-channel closed-loop; scale factor; zero bias stability; temperature compensation; miniature prototype silicon microgyroscope SMG; self-oscillating; dual-channel closed-loop; scale factor; zero bias stability; temperature compensation; miniature prototype





Author: Dunzhu Xia * , Shuling Chen and Shourong Wang

Source: http://mdpi.com/



DOWNLOAD PDF




Related documents