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Department of Mechanical Engineering, University of Alberta, Edmonton, AB, T6G 2G8, Canada





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Abstract A major problem that often arises in modeling Micro Electro Mechanical Systems MEMS such as Surface Acoustic Wave SAW sensors using Finite Element Analysis FEA is the extensive computational capacity required. In this study a new approach is adopted to significantly reduce the computational capacity needed for analyzing the response of a SAW sensor using the finite element FE method. The approach is based on the plane wave solution where the properties of the wave vary in two dimensions and are uniform along the thickness of the device. The plane wave solution therefore allows the thickness of the SAW device model to be minimized; the model is referred to as a Reduced 3D Model R3D. Various configurations of this novel R3D model are developed and compared with theoretical and experimental frequency data and the results show very good agreement. In addition, two-dimensional 2D models with similar configurations to the R3D are developed for comparison since the 2D approach is widely adopted in the literature as a computationally inexpensive approach to model SAW sensors using the FE method. Results illustrate that the R3D model is capable of capturing the SAW response more accurately than the 2D model; this is demonstrated by comparison of centre frequency and insertion loss values. These results are very encouraging and indicate that the R3D model is capable of capturing the MEMS-based SAW sensor response without being computationally expensive. View Full-Text

Keywords: Finite Element Analysis; Aluminum Nitride; Surface Acoustic Waves; MEMS; SAW sensors Finite Element Analysis; Aluminum Nitride; Surface Acoustic Waves; MEMS; SAW sensors





Autor: Mohamed M. El Gowini and Walied A. Moussa *

Fuente: http://mdpi.com/



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