Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic StiffnessReportar como inadecuado


Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness


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1

Department of Civil and Environmental Engng., Politecnico di Milano, 20133 Milano, Italy

2

MSH Division, ST Microelectronics, 20010 Cornaredo MI, Italy





*

Author to whom correspondence should be addressed.



Academic Editor: Vittorio M. N. Passaro

Abstract Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach. View Full-Text

Keywords: micromirrors; MOEMS; Mathieu equation; parametric resonance; continuation approach; arc length algorithm; material derivative; comb-fingers; electrostatic force and torque; electrostatic stiffness micromirrors; MOEMS; Mathieu equation; parametric resonance; continuation approach; arc length algorithm; material derivative; comb-fingers; electrostatic force and torque; electrostatic stiffness





Autor: Attilio Frangi 1,* , Andrea Guerrieri 1 and Nicoló Boni 2

Fuente: http://mdpi.com/



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