Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square FootprintReportar como inadecuado




Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint - Descarga este documento en PDF. Documentación en PDF para descargar gratis. Disponible también para leer online.

1

Institute of Bioengineering, École Polytechnique Fédérale de Lausanne EPFL, 1015 Lausanne, Switzerland

2

DIEGM, Università degli Studi di Udine, 33100 Udine, Italy

3

Laboratoire d’Électronique et de Technologie de l’Information LETI, Commissariat à l’Énergie Atomique et aux Énergies Alternatives CEA, 38054 Grenoble Cedex 9, France





*

Author to whom correspondence should be addressed.



Academic Editors: Mark A. Reed and Mathias Wipf

Abstract The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by the device, thus hampering the scalability of on-chip analytical systems which detect the DNA polymerase through pH measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties of voltage-to-current transduction, which can be advantageously exploited for pH sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor CMOS-compatible technology, showing that reducing the width of the devices below a few hundreds of nanometers leads to higher charge sensitivity. Moreover, devices composed of several wires in parallel further increase the exposed surface per unit footprint area, thus maximizing the signal-to-noise ratio. This technology allows a sub milli-pH unit resolution with a sensor footprint of about 1 µm2, exceeding the performance of previously reported studies on silicon nanowires by two orders of magnitude. View Full-Text

Keywords: silicon nanowires; tri-gate transistors; ISFET; pH sensors; 1-f noise silicon nanowires; tri-gate transistors; ISFET; pH sensors; 1-f noise





Autor: Enrico Accastelli 1, Paolo Scarbolo 2, Thomas Ernst 3, Pierpaolo Palestri 2, Luca Selmi 2 and Carlotta Guiducci 1,*

Fuente: http://mdpi.com/



DESCARGAR PDF




Documentos relacionados