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J. J. Olaya ; R. Rodríguez-Baracaldo ;Ingeniería e Investigación 2012, 32 3

Autor: L. Velasco

Fuente: http://www.redalyc.org/


Introducción



Ingeniería e Investigación ISSN: 0120-5609 revii_bog@unal.edu.co Universidad Nacional de Colombia Colombia Velasco, L.; Olaya, J.
J.; Rodríguez-Baracaldo, R. The corrosion resistance and microstructure of UBM system-deposited NbxSiyNz thin films Ingeniería e Investigación, vol.
32, núm.
3, diciembre, 2012, pp.
10-13 Universidad Nacional de Colombia Bogotá, Colombia Available in: http:--www.redalyc.org-articulo.oa?id=64324939003 How to cite Complete issue More information about this article Journals homepage in redalyc.org Scientific Information System Network of Scientific Journals from Latin America, the Caribbean, Spain and Portugal Non-profit academic project, developed under the open access initiative INGENIERÍA E INVESTIGACIÓN VOL.
32 No.
3, DECEMBER 2012 (10-13) The corrosion resistance and microstructure of UBM system-deposited NbxSiyNz thin films Resistencia a la corrosión y microestructura de recubrimientos de NbxSiyNz depositadas con el sistema UBM L.
Velasco1, J.
J.
Olaya2, R.
Rodríguez-Baracaldo3 ABSTRACT NbxSiyNz thin film nanostructure was grown using the unbalanced magnetron sputtering (UBM) technique with varying Si content. Corrosion resistance was evaluated by potentiodynamic polarisation technique in a 3% NaCl solution.
Microstructure was analysed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and laser scanning microscopy.
Chemical composition was ascertained by X-ray fluorescence (XRF) technique.
The results showed that deposition rates increased with higher Si content.
A microstructural change was observed for greater than 5% Si content through the transition from a crystalline to an amorphous structure in the thin films.
Corrosion test results demonstrated that the thin films having the highest silicon content had better corrosion resistance. Keywords: Corrosion, diffraction, spectroscopy, fluorescence, microstructure, microscopy, race track, x ray, thin film, sputtering, polarisation. RESUMEN En este traba...





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