en fr Design and realization of a new generation of nano-gas sensors based on semiconductor nanowires Conception et réalisation dune nouvelle génération de nano-capteurs de gaz à base de nanofils semiconducteurs Report as inadecuate




en fr Design and realization of a new generation of nano-gas sensors based on semiconductor nanowires Conception et réalisation dune nouvelle génération de nano-capteurs de gaz à base de nanofils semiconducteurs - Download this document for free, or read online. Document in PDF available to download.

1 LAAS-MPN - Équipe Matériaux et Procédés pour la Nanoélectronique LAAS - Laboratoire d-analyse et d-architecture des systèmes Toulouse 2 LAAS-MICA - Équipe MICrosystèmes d-Analyse LAAS - Laboratoire d-analyse et d-architecture des systèmes Toulouse

Abstract : In recent years, efforts of research and development for gas sensors converged to use nanomaterials to optimize performance. This new generation promises many advantages especially in miniaturization and reduction of energy consumption. Furthermore, the gas detection parameters sensitivity, detection limit, response time

. are improved due to the high surface-volume ratio of the sensitive part. Thus, this sensors can be integrated in ultrasensitive detection systems, autonomous, compact and transportable. In this thesis, we propose to use 3D semiconductor nanowires networks to create highly sensitive and selective gas sensors. The objective of this work is to provide a highly sensitive sensor, featuring a low detection limit in the ppb range and embeddable in CMOS devices. In addition process is generic and adaptable to many types of materials to discriminate several gas and converge to electronic nose. The first part of the dissertation is based on development of a large scale, reproducible, compatible with Si processing industry and conventional tools CMOS, to obtain a sensor based on a 3D nanowire architecture. The device is composed by two symmetrical aluminum contacts at each extremity of the nanowires, including a top contact done by air bridge approach. The second part of this work presents the gas performances of components and working mechanisms associated. A very high response 30% is obtained at 50 ppb of NO2, compare to the state of the art, 25% reached for 200 ppb. This approach can measure selectively very low concentrations of gas



Author: Brieux Durand -

Source: https://hal.archives-ouvertes.fr/



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