Nanosphere Lithography: A Powerful Method for the Controlled Manufacturing of NanomaterialsReport as inadecuate




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Journal of NanomaterialsVolume 2013 2013, Article ID 948510, 19 pages

Review Article

University of Liege, Chemistry Department, Group of Research in Energy and Environment from Materials GREENMAT, Allée de la Chimie 3 Building B6, 4000 Liege Sart Tilman, Belgium

University of Liege, Center for Applied Technology in Microscopy CATµ, Allée de la Chimie 3 Building B6, 4000 Liege Sart Tilman, Belgium

Received 10 July 2013; Accepted 26 August 2013

Academic Editor: Tifeng Jiao

Copyright © 2013 Pierre Colson et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The never-ending race towards miniaturization of devices induced an intense research in the manufacturing processes of the components of those devices. However, the complexity of the process combined with high equipment costs makes the conventional lithographic techniques unfavorable for many researchers. Through years, nanosphere lithography NSL attracted growing interest due to its compatibility with wafer-scale processes as well as its potential to manufacture a wide variety of homogeneous one-, two-, or three-dimensional nanostructures. This method combines the advantages of both top-down and bottom-up approaches and is based on a two-step process: 1 the preparation of a colloidal crystal mask CCM made of nanospheres and 2 the deposition of the desired material through the mask. The mask is then removed and the layer keeps the ordered patterning of the mask interstices. Many groups have been working to improve the quality of the CCMs. Throughout this review, we compare the major deposition techniques to manufacture the CCMs focusing on 2D polystyrene nanospheres lattices, with respect to their advantages and drawbacks. In traditional NSL, the pattern is usually limited to triangular structures. However, new strategies have been developed to build up more complex architectures and will also be discussed.





Author: Pierre Colson, Catherine Henrist, and Rudi Cloots

Source: https://www.hindawi.com/



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