Flying phase mask for the printing of long submicron-period stitchingless gratingsReportar como inadecuado




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1 LHC - Laboratoire Hubert Curien Saint Etienne

Abstract : Long and stitchingless gratings are printed by means of a read-write head comprising a phase mask illuminated by an intensity modulated laser beam and a reference grating displacement sensor which dictates the modulation period real time. A nearly perfect grating copying is achieved by fixing the sensor grating scale and the written grating substrate on a long platform sliding under the read-write head

Keywords : Optical lithography Phase mask Stitching Grating





Autor: E. Gamet - Y. Jourlin - S. Pelissier - R. Min - S. Reynaud - C. Veillas - J.-C. Pommier - O. Parriaux -

Fuente: https://hal.archives-ouvertes.fr/



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