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Abstract: Photonic or electronic confinement effects in nanostructures becomesignificant when one of their dimension is in the 5-300 nm range. Improvingtheir development requires the ability to study their structure - shape, strainfield, interdiffusion maps - using novel techniques. We have used coherentdiffraction imaging to record the 3-dimensionnal scattered intensity of singlesilicon nanowires with a lateral size smaller than 100 nm. We show that thisintensity can be used to recover the hexagonal shape of the nanowire with a28nm resolution. The article also discusses limits of the method in terms ofradiation damage.



Autor: V. Favre-Nicolin, J. Eymery, R.K. Koster, P. Gentile

Fuente: https://arxiv.org/







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