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Chinese Science Bulletin

, Volume 57, Issue32, pp 41994204

First Online: 10 July 2012Received: 02 November 2011Accepted: 08 February 2012DOI: 10.1007-s11434-012-5292-y

Cite this article as: Chen, R., Liang, W., Zhang, H. et al. Chin. Sci. Bull. 2012 57: 4199. doi:10.1007-s11434-012-5292-y


We prepared a series of lithium lanthanum titanate LLTO thin film electrolytes by radio frequency RF magnetron sputtering using LLTO targets in a N2 atmosphere. We also deposited the LLTO thin films in an Ar atmosphere under a same condition as references for comparison. The microstructure morphology and the composition of the thin films were investigated by X-ray diffraction XRD, scanning electron microscopy SEM and X-ray photoelectron spectroscopy XPS, respectively. Results show that the thin film has an amorphous structure with a uniform surface and it is free of pinholes and cracks. Impedance measurements reveal that the ionic conductivity of the electrolytes is beneficial for all solid lithium batteries dependent on the lithium content at room temperature. We found that the amorphous LLTO thin film performs well and it has potential application in microbatteries for use in microelectronic devices.

KeywordsLLTO thin film electrolytesRF magnetron sputteringionic conductivitylithium batteriesThis article is published with open access at

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Autor: RenJieChen - WeiLiang - HaiQinZhang - FengWu - LiLi


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