Effect of Grazing Angle Cross-Ion Irradiation on Ag Thin FilmsReport as inadecuate

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Nanoscale Research Letters

, 11:454

First Online: 11 October 2016Received: 18 August 2016Accepted: 29 September 2016


Apart from the spherical shape, control over other shapes is a technical challenge in synthesis approaches of nanostructures. Here, we studied the effect of grazing angle cross-irradiation Ag thin films for the nanostructures evolution from a top-down approach. Ag thin films of different thicknesses were deposited on Si 100 and glass substrates by electron beam evaporation system and subsequently irradiated at grazing angle ions by 80 keV Ar in two steps to induce effectively a cross-ion irradiation. Pristine films exhibited dense and uniform distribution of Ag nanoparticles with their characteristic surface plasmon resonance-induced absorption peak around 420 nm. When the film surfaces were treated with cross-grazing angle irradiation of Ar ions with varying effective fluences from 0.5 × 10 ions-cm to 2.0 × 10 ions-cm, it was found that fluence values governed the competition of sputtering and sputter re-deposition of Ag. As a result, lower irradiation fluence favoured the formation of cone-like nanostructures, whereas high fluence values demonstrated dominant sputtering. Fluence-dependent modification of surface features was studied through the Fourier transform infrared spectroscopy and the Rutherford backscattering spectroscopy. Theoretical justifications for the underlying mechanisms are presented to justify the experimental results.

KeywordsSputtering Sputter re-deposition Silver Irradiation Cone-like nanostructures AbbreviationsAFMAtomic force microscope

EDXEnergy dispersive X-ray spectroscopy

FESEMField emission scanning electron microscope

RBSRutherford backscattering spectroscopy

SIMNRASimulation of non-Rutherford backscattering

TRIMTransport of ions in matter

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Author: Manish Kumar - Teena Jangid - Vandana Panchal - Praveen Kumar - Abhishek Pathak

Source: https://link.springer.com/

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