Growth of Sr,La-Ta,Ti-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structureReportar como inadecuado




Growth of Sr,La-Ta,Ti-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure - Descarga este documento en PDF. Documentación en PDF para descargar gratis. Disponible también para leer online.

* Corresponding author 1 IETR - Institut d-Electronique et de Télécommunications de Rennes 2 ISCR - Institut des Sciences Chimiques de Rennes

Abstract : In the search for new dielec. and ferroelec. compds., we were interested in the perovskite Sr1-​xLax​2Ta1-​xTix​2O7 solid soln. with ferroelec. end members Sr2Ta2O7 TCurie=-​107 °C and La2Ti2O7 TCurie=1461 °C​. In order to achieve a Curie temp. close to room temp., the formulation with x=0.01 was chosen and synthesized as thin films by reactive radio-​frequency magnetron sputtering. In oxygen rich plasma, a Sr0.99La0.01​2Ta0.99Ti0.01​2O7 film is deposited, characterized by a band-​gap Eg=4.75 eV and an 1 1 0 epitaxial growth on 0 0 1​MgO substrate. The use of nitrogen rich plasma allows to synthesize Sr0.99La0.01​Ta0.99Ti0.01​O2N oxynitride films, with band gap Eg∼2.10 eV and a polycryst., textured or epitaxial growth on 0 0 1​MgO substrate. Nitrogen-​substoichiometric oxynitride films with larger lattice cells are produced for low dinitrogen percentages in the sputtering plasma.

Keywords : X-ray diffraction Perovskites Nitrides Oxides Dielectric materials Physical vapor deposition processes





Autor: Claire Le Paven - Laurent Le Gendre - Ratiba Benzerga - François Cheviré - F. Tessier - S. Jacq - S. Traoré-Mantion - Ala Shar

Fuente: https://hal.archives-ouvertes.fr/



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