Polyimide-SU-8 catheter-tip MEMS gauge pressure sensorReport as inadecuate

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Biomedical Microdevices

, Volume 14, Issue 5, pp 819–828

First Online: 26 May 2012


This paper describes the development of a polyimide-SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.

KeywordsPressure sensor Pressure monitoring Biosensor Strain sensor Catheter-tip Polyimide SU-8 W. Hasenkamp and D. Forchelet contribute equally.

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Author: Willyan Hasenkamp - David Forchelet - Kristopher Pataky - Jimmy Villard - Harald Van Lintel - Arnaud Bertsch - Qing Wang -

Source: https://link.springer.com/

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