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Applied Physics B

, Volume 105, Issue 4, pp 775–781

First Online: 12 November 2011Received: 11 April 2011Revised: 18 August 2011


Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer the target by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength filtering, can be thought as a quasi-monochromatic, but spatially incoherent, source. In the present work, benefits of using a focused spot from a spatially coherent light source, as that emitted by a laser, are investigated on a theoretical viewpoint. The focused spot is scanned over the object of interest and, for each scan position, a far-field diffraction pattern is recorded. Our results show that spatially coherent light can sensibly increase the accuracy of the technique with respect to the target’s geometrical profile.

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Author: O. El Gawhary - N. Kumar - S. F. Pereira - W. M. J. Coene - H. P. Urbach


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