Ultrathin barium titanate films by polyol thermal decomposition processReport as inadecuate

Ultrathin barium titanate films by polyol thermal decomposition process - Download this document for free, or read online. Document in PDF available to download.

Journal of Materials Science

, Volume 45, Issue 22, pp 6275–6279

First Online: 02 September 2010Received: 03 June 2010Accepted: 19 August 2010


We have successfully fabricated barium titanate BaTiO3 films on Si 100 and Pt111-Ti-SiO2-Si substrates using the polyol thermal decomposition PTD process by spin-coating technique. In PTD process, we confirmed that the crystalline oxycarbonate Ba2Ti2O5CO3 films were directly formed as a consequence of evaporation of polyol precursor solution prepared simply by mixing metal chlorides and ethylene glycol, and then converting them into crystalline BaTiO3 films through thermal decomposition at >500 °C. This feature makes it possible to grow densely packed and crack-free BaTiO3 films as thin as 70 Å per cycle. Although PTD is described here for a complex metal-oxide film of BaTiO3, other simple and complex metal-oxide thin films with high-dielectric constant materials are also likely to be suitable for deposition with accurate control of film thickness and composition using the polyol precursor solutions.

Download fulltext PDF

Author: Hyeong Seok Lee - Sang Man Koo - Jung Whan Yoo

Source: https://link.springer.com/

Related documents